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(EM,TDDB,HCI,ACT)
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Water Level Reliability
•Centaur
•Capabilities：
Multi purpose wafer level tester
•Description：

Fully automated wafer level deep submicron reliability evaluation station,with capabilities to perform parallel testing
•PE 9015a
•Capabilities：
Ambient eletromigration (EM) and time dependent dieletric breakdown (TDDB), Package or Wafer testing, 120 EM and thin dielectric test, constant current EM, TCR, SWEAT, Isothermal, TDDB constant voltage, Ebd & Qbd Tests (V-Ramp & J-Ramp), Automatic calibration
•Description：
Computer controlled platform used to perform constant current, SWEAT, and TCR electromigration testing as well as constant or ramped voltage and ramped current TDDB testing
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