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(EM,TDDB,HCI,ACT)
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耗材
Furnace System 爐管
- MRL 生產 4 ” ~ 12 ” Furnace system 機台 . 可為客戶設計訂制符合需求之高低溫爐管製程系統.
•Cyclone Series Furnace Systems •HT/LT Series Furnace Systems
- 爐管設備
Cyclone Model
# of Tubes per furnace
Tube Center Line
Maximum Substrate Size
Thermal Flat Zone
630
4
17.25"
150MM
30.0"
640
4
17.25"
150MM
40.0"
830
3
21.00"
200MM
30.0"
840
3
21.00"
200MM
40.0"
1224
2
28.00"
300MM
24.0"
•Heating Element 爐管加熱器
MRL 於 2003 年 4 月通過 ISO 9001: 2000 , 是已累積 25 年製造高低溫爐管加熱器之高品質廠商 . 可為客戶設計訂制符合需求之高低溫爐管加熱器
• Aztec - APM wire / interlocking spacers
• Helix II - AMR wire / interlocking spacers
• Helix - AMR wire / standard spacers
• Diffusion Cassette - A1 wire / standard spacers
- MRL Industries Interlocking Spacer Technology
US Patent #5,095,192 		Ceramic T/C holder / clip
US Patent # 4,596,922
•MRL 產品
[ Horizontal Furnaces ]
* Bandit
Space saving,innovative design for R&D and light prodution applications. 		* Phoenix
Superior temperature uniformity for large wafers in a horizontal configuration.		 * Cyclone
Improves furnace efficiencies.
[ Standalone Furnaces ]
* Continuous Process Machine
Proven batch technologies applied in revolutionary new concept in continuous furnace design. 		* Table Top
Ideal for R&D labs,universities,small production areas.		 * Conveyor
High volume firing of production thick-film circuits.
[ Heating Elements ]
* Black Max
Low temp/fast-response processing.Fits most existing systems. 		* Helix/Helix II/Aztec
Available as direct replacements.		 * Magna
Vertical replacement heating elements.
[ Heating Accessories ]
* FastCool
Accelerates furnace cooling with product in chamber.
* PyroXTorch
Provides ultra pure steam for oxidation processes.		 * Cantilever Loader
Available in soft-land or full cantilever configurations. 		* Protec Sag Detector
Protects your silion carbide tubes.		 * V-Blocks & Supports
Customized for any tube size or application		 * Thermocouples Manufactured to meet customer needs. * Soft Discs & Collars
Customized or standard for wide array of applications.
 
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